Class 101 Cleanroom Equipment

The Nanorite Innovation Center in Eau Claire, Wisconsin features a Class 100 Cleanroom. 

• A Class 100 Cleanroom
  • Contact aligner
  • Oxidation furnace
  • Wet benches
  • Spin coater
  • RF sputter system
  • Parametric analyzer
  • Optical microscope
  • Linewidth measurement system
  • Surface profiler
  • Ellipsometer
  • Optical thin film measurement system
  • 4-point probe
  • Plasma etcher
  • PECVD system
• Advanced Manufacturing Technologies
• Nanoscience Laboratory