Nanoscience Laboratory

Accelerate product and prototype development at the Center's Nanoscience Laboratory.

To support a wide range of applications, the laboratory will house:

• Nanoscience Laboratory
  • Scanning Electron Microscope (SEM) JEOL 6060LV
    • Backscattered electron detector
    • Infrared chamberscope
    • 3.5 nm resolution
    • .5 kV to 30 kV
    • Low vacuum mode 10-27 Pa
    • Magnification 5X-300,000X
    • 1 pA to 1 A probe current
    • Beam blanking (can be used for ebeam lithography with additional pattern generation software)
    • Motor drive stage
  • Energy Dispersive X-ray Spectroscopy (EDS) Genesis 2000 XMS
  • Scanning Probe Microscope Veeco CPII
    • On-axis view must have magnification to give feature resolution of 1 to 2 microns
    • Atomic resolution with 100 um scanner on graphite or mica
    • Following modes: Contact, Lateral Force Microscopy (LFM), Tapping Mode, Phase Imaging, and Scanning Tunneling Microscopy (STM)
• Class 100 Clean Room
• Advanced Manufacturing Technology